Absolute Calibration Of An Optical Flat
Abstract
A method for the absolute calibration of a flat optical surface is described. An algorithm which utilizes the orthogonal properties of the Zernike polynomials was used on interferometric data to fabricate and certify three 10-inch Zerodur reference flats to X/100 peak-to-valley quality.
- Publication:
-
Optical Engineering
- Pub Date:
- August 1984
- DOI:
- 10.1117/12.7973304
- Bibcode:
- 1984OptEn..23..379F