Thin film analysis by low energy proton induced X-ray emission
Abstract
A 100 keV proton beam has been used for measuring the thickness of thin films from the proton energy loss determined by using the energy dependence of the yield of X-rays emitted from a gold backing. Comparison between the proposed method and Rutherford backscattering is shown for erosion, thermal interdiffusion or ion beam mixing experiments with carbon and aluminum-gold films.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- August 1984
- DOI:
- 10.1016/0168-583X(84)90589-5
- Bibcode:
- 1984NIMPB...4..408T