Effect of additional heavy metal layer on ZnO-Si monolithic saw devices
Abstract
Enhancement of electromechanical coupling has been shown in numerical calculations with an additional massive and conducting layer, such as Au, which makes the velocity of SAW slow between a ZnO thin film and an Si substrate. It is also shown that the electromechanical coupling factor can be increased without deterioration of the temperature coefficient of phase velocity.
- Publication:
-
Electronics Letters
- Pub Date:
- October 1984
- DOI:
- 10.1049/el:19840617
- Bibcode:
- 1984ElL....20..908Y
- Keywords:
-
- Integrated Circuits;
- Metal Films;
- Silicon;
- Surface Acoustic Wave Devices;
- Thin Films;
- Zinc Oxides;
- Gold Coatings;
- Heavy Elements;
- Oxide Films;
- Phase Velocity;
- Substrates;
- Electronics and Electrical Engineering