X-ray microanalysis in the analytical electron microscope
Abstract
The theoretical basis for X-ray microanalysis of thin foils in the analytical electron microscope (AFM) are described. The theoretical models and input data used in computer program Experimental Thin Foil which is currently used at Sandia National Laboratories to reduce AFM X-ray data are presented and discussed in detail. A theoretical development of X-ray standardless thin film analysis in the AEM using Cliff-Dorimer K/sub AE/ values for K/sub (-); and I/sub (-)/ lines is presented. The data from the physics literature (ionization cross sections, fluorescence yields, (-) intensity ratios) used to calculate K/sub AB/ has been evaluated. The correction of K/sub AB/ factors for detector efficiency is discussed. The calculated values of K/sub AB/ for K/sub (-)/ and I/sub (-)/ lines compare favorably to values which have been determined experimentally. Methods to calculate and correct for X-ray absorption and fluorescence as a function of X-ray take-off angle and foil thickness are presented. Techniques for measuring foil thickness are reviewed. X-ray spatial resolution in thin foils is discussed from the theoretical and experimental viewpoint. The statistical quality of AEM data is considered.
- Publication:
-
Unknown
- Pub Date:
- June 1983
- Bibcode:
- 1983xmae.rept.....R
- Keywords:
-
- Computer Programs;
- Electron Microscopes;
- Microanalysis;
- X Ray Analysis;
- Computer Systems Programs;
- Electron Microscopy;
- Thin Films;
- X Ray Absorption;
- Solid-State Physics