Ion-molecule reactions and plasma parameters of positive column in oxygen glow discharge

Oxygen glow discharge plasmas have many applications, such as oxidations of polymers, semiconductors, and photoresist removal. The physical characteristics of this discharges depend on the plasma parameters which are much influenced by many reactions in discharge tubes. The oxygen glow dischages are investigated theoretically by taking account of the many reactions in discharge tubes. The calculated values of plasma parameters such as electron temperature, axial electric field, and relative concentrations of charged particles of oxygen glow discharges were obtained. Furthermore, in order to compare these theoretical values with experimental results, the electron temperature and axial electric field were studied by the probe method and the relative concentrations of charged particles were measured by mass spectrometer. It is shown that the calculated results of electron temperature and axial electric field of oxygen flow discharges agree well with these experimental ones. The calculated results of the relative concentrations of charged particles also agree with the measured values by mass spectrometer.