Monolithic ZnO SAW (Surface Acoustic Waves) structures
Abstract
ZnO-on-silicon surface acoustic wave devices have been fabricated and tested. Electronic erasure of a stored correlator reference was demonstrated, the effect of laser annealing on propagation loss was examined, preliminary ageing studies were performed, and a conceptually new mode conversion resonator configuration was reported.
- Publication:
-
Interim Scientific Report
- Pub Date:
- July 1983
- Bibcode:
- 1983puwl.rept.....G
- Keywords:
-
- Annealing;
- Atomic Structure;
- Deposition;
- High Frequencies;
- Integrated Circuits;
- Resonators;
- Silicon Junctions;
- Zinc Oxides;
- Laser Applications;
- Low Temperature;
- Microelectronics;
- Microwaves;
- Piezoelectric Transducers;
- Surface Acoustic Wave Devices;
- Surface Waves;
- Transducers;
- Transmission Loss;
- Electronics and Electrical Engineering