The study of thin films on semi-insulating gallium arsenide by ellipsometry
Abstract
A computer-grid procedure is discussed where delta and psi values obtained from a thin filmed surface are used to estimate the optical constants of the film-free surface. Thin films can be measured with reasonable accuracy on gallium arsenide; however, the optical constants of these films cannot be obtained.
- Publication:
-
Final Report
- Pub Date:
- June 1983
- Bibcode:
- 1983pafb.reptQ....M
- Keywords:
-
- Ellipsometers;
- Field Effect Transistors;
- Gallium Arsenides;
- Thin Films;
- Computer Techniques;
- Data Acquisition;
- Optical Properties;
- Permittivity;
- Tables (Data);
- Solid-State Physics