Semiconductor technology program progress briefs
Abstract
s of publications on measurement technology for semiconductor materials, process control, and devices are provided. Emphasis is placed on silicon and silicon-based devices. Topics include: defects and impurities, IC test structures, micrometrology, packaging, physical analysis, power devices, process and device modeling, and radiation effects. In addition, publications in press and conference presentations are listed. Information is also given on seminars, workshops, and symposia and those scheduled.
- Publication:
-
Interim Report
- Pub Date:
- January 1983
- Bibcode:
- 1983nbs..reptS....W
- Keywords:
-
- Process Control (Industry);
- Semiconductor Devices;
- Semiconductors (Materials);
- Defects;
- Electronic Packaging;
- Impurities;
- Integrated Circuits;
- Micrometeorology;
- Instrumentation and Photography