Pulsed laser melting: The effect of implanted solutes on the resolidification velocity
Abstract
Transient electrical conductance was used to measure the resolidification velocity in silicon containing implanted solutes. Nonequilibrium segregation of the solutes occurs during the rapid resolidification following pulsed laser melting. The velocity of the liquid-solid interface is observed to depend on the type and concentration of the solute. A 25% reduction in solidification velocity is observed for an implanted indium concentration of three atomic percent. Implanted oxygen is also shown to reduce the solidification velocity. The dependence of the velocity on solute concentration impacts a variety of segregation, trapping and supersaturated solution studies.
- Publication:
-
Presented at the Mater. Res. Soc. Ann. Meeting
- Pub Date:
- 1983
- Bibcode:
- 1983mrs..meet.....G
- Keywords:
-
- Ion Implantation;
- Laser Heating;
- Melting;
- Pulsed Lasers;
- Solidification;
- Solutes;
- Depth;
- Indium;
- Liquid-Solid Interfaces;
- Oxygen;
- Radiant Heating;
- Silicon;
- Supersaturation;
- Velocity;
- Lasers and Masers