Resonance between channeled particle wavelengths and periodicity of strained-layer superlattices

The resonance effect between the wavelength of planar channeled ions and the periodicity of strained layer superlattices for MeV (4) He ions backscattering from GaAs/sub x/P/sub 1-x//GaP superlattices are summarized. When the incident beam energy is adjusted so the half wavelength matches the thickness of the layers, a catastrophic dechanneling effect is observed. A phase rotation analysis was developed to calculate the dechanneling in each layer and good agreement is obtained with the observed dechanneling per interface. The resonance effect is used to measure the amount of strain in the GaAs/sub x/P/sub 1-x//GaP strained layer superlattice.