Investigation on low pressure limit of Bayard-Alpert gauge
Abstract
To extend the pressure measurement of devices used in most UHV applications to the lowest limit possible, several commercial Bayard-Alpert gauges were modified. A hairpin flament, used in this experiment for its accuracy in positioning the filament to improve the gauge performance. The quantities of the normal and reverse X-ray photo current and possibility of self modulation are presented. The potential of this gauge to measure pressures down to 10(+13) Torr range with lower emission current is strongly indicated.
- Publication:
-
Presented at the Am. Vacuum Soc. Meeting
- Pub Date:
- 1983
- Bibcode:
- 1983avs..confR...1C
- Keywords:
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- Bayard-Alpert Ionization Gages;
- Electric Current;
- Modulation;
- Design;
- Limits (Mathematics);
- Sensitivity;
- Instrumentation and Photography