Walk-through survey report: Control technology for integrated circuit fabrication, Xerox Corporation, El Segundo, California
Abstract
A preliminary control technology assessment survey was conducted at the facility which manufactures N-channel metal oxide semiconductor (NMOS) integrated circuits. The facility has industrial hygiene review procedures for evaluating all new and existing process equipment. Employees are trained in safety, use of personal protective equipment, and emergency response. Workers potentially exposed to arsenic are monitored for urinary arsenic levels. The facility should be considered a candidate for detailed study based on the diversity of process operations encountered and the use of state-of-the-art technology and process equipment.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- May 1983
- Bibcode:
- 1983STIN...8412333M
- Keywords:
-
- Fabrication;
- Industrial Safety;
- Integrated Circuits;
- Process Control (Industry);
- Arsenic;
- Human Factors Engineering;
- Protection;
- Engineering (General)