HMOS 2 - The first step toward VLSI

The theory, design, manufacture, and applications of HMOS VLSI devices are explored. VLSI technology may be a significant change in electronic components, offering minimal geometries of 2 microns and 10,000 components per Si chip. The progress of higher density components is discussed in terms of a constant, with its reciprocal representing the fraction of power and size with each new generation. HMOS-2 devices offer integration density twice that of HMOS 1 and a functional frequency increased by a factor of 2.5. The HMOS devices have 2000-26000 transistors/sq mm, and have logic applications in microprocessors, microcomputers, and peripheral equipment. Analog applications include implementation for FFT, correlator, and multiplier functions. Finally, numerical simulations of more complex phenomena will become possible with the chips. Details of the photolithographic manufacturing processes are provided, as are performance measurements of various HMOS-2 devices currently being produced.