Discharge-pumped high pulse eximer laser
Abstract
A discharge-pumped repetitively pulsed excimer laser was developed whose efficiency is about 1%. At a pulse repetition rate of 100 Hz, and pulse energies of 75 mJ and 100 mJ were achieved for XeCl XeF, respectively. The pulse power and pulse energy of the XeF and XeCl lasers generating at wavelengths of 350 and 308 nm, respectively, are plotted as a function of the laser mixture composition and pressure.
- Publication:
-
USSR Rept Phys Math JPRS UPM
- Pub Date:
- September 1983
- Bibcode:
- 1983RpPhM........6V
- Keywords:
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- Excimer Lasers;
- Kirchhoff Law Of Networks;
- Laser Outputs;
- Pulse Rate;
- Laser Materials;
- Reliability Analysis;
- Rlc Circuits;
- Xenon Chloride Lasers;
- Xenon Fluoride Lasers;
- Lasers and Masers