SEM-EBIC and traveling light spot diffusion length measurements - Normally irradiated charge-collecting diode
Abstract
An analysis of the induced current in a normally irradiated diode by monochromatic light or a SEM electron beam is given, which can be used to determine the diffusion length. Two light sources are considered: a traveling light spot and uniform illumination with part of the sample containing the diode shadowed by a knife-edge mask. The diffusion length is determined by readily computed numerical calculations.
- Publication:
-
IEEE Transactions on Electron Devices
- Pub Date:
- June 1983
- DOI:
- 10.1109/T-ED.1983.21171
- Bibcode:
- 1983ITED...30..577I
- Keywords:
-
- Carrier Transport (Solid State);
- Electrical Measurement;
- Junction Diodes;
- Light Beams;
- Minority Carriers;
- Carrier Injection;
- Diffusion;
- Electric Current;
- Electron Microscopes;
- Length;
- Electronics and Electrical Engineering