Gigabit logic bipolar technology advanced super self-aligned process technology

The fabrication and testing of a practical bipolar logic circit, a three-stage frequency divider, which utilizes advanced super self-aligned process technology are discussed. The logic circuit has been operated at clock frequencies up to 5.5 GHz. Two kinds of 51-stage ring oscillators made with this technology have been fabricated for high-speed bipolar LSIs. Nonthreshold logic circuits with propagation delays of 42 ps/gate and power-delay products of 20 fJ/gate have been obtained, as well as low-level current mode logic circuits with propagation delays of 90 ps/gate and power-delay products of 53 fJ/gate. In these integrated circuits, an emitter with a 0.5 micron width was obtained by using 1 micron-rule photo photolithography.