Superconductive niobium oxide tunnel device program
Abstract
The purpose of this program was to develop the technology for the fabrication of small-area Josephson tunnel junctions with niobium electrodes for use as microwave detectors and mixers. Niobium-niobium oxide-lead junctions were used to establish processes for sputter cleaning and sputter oxidizing the niobium base electrode. When these processes were established, niobium-niobium oxide-niobium junctions were made by sputtering the base electrode, sputtering cleaning and sputter oxidizing the base electrode in a sputter deposition system with backsputter capability, and evaporating the upper electrode in an electron-beam evaporation system. Experiments were also done to make junctions with aluminum-oxide barriers. The report is divided into seven parts: (1) vacuum systems, (2) masks for photolithography, (3) processing techniques, (4) niobium-niobium oxide-lead junctions, (5) niobium-niobium oxide-niobium junctions, (6) niobium-aluminum oxide-aluminum-niobium junctions, (7) summary and conclusions.
- Publication:
-
Final Report
- Pub Date:
- April 1982
- Bibcode:
- 1982ti...rept.....B
- Keywords:
-
- Electrodes;
- Josephson Junctions;
- Niobium;
- Superconductors;
- Aluminum Oxides;
- Barrier Layers;
- Fabrication;
- Photolithography;
- Sputtering;
- Vacuum Systems;
- Electronics and Electrical Engineering