Analysis of failure during the manufacturing of integrated circuits
Abstract
To maintain the electrical output of integrated circuits at a high and stable level, a special analysis of failure techniques is systematically applied to plates of integrated circuits that have abnormal output. Aspects discussed include: a synoptic table of operations for failure analysis; methodology; preliminary data; visual analysis of defects; demonstration of crystal defects; and electrical analysis. Some examples illustrate the advantages of the method which are the reduction of fabrication cost, and improvement of the quality and reliability of products in a comprehensive, controlled procedure.
- Publication:
-
Reliability and Maintainability
- Pub Date:
- September 1982
- Bibcode:
- 1982rema.rept..533D
- Keywords:
-
- Circuits;
- Fabrication;
- Failure Analysis;
- Integrated Circuits;
- Quality Control;
- Bipolarity;
- Crystal Defects;
- Epitaxy;
- Process Control (Industry);
- Substrates;
- Visual Observation;
- Electronics and Electrical Engineering