Optimization of pulsed electron beam annealing process for silicon solar cells
Abstract
- Publication:
-
Photovoltaic Solar Energy Conference
- Pub Date:
- 1982
- Bibcode:
- 1982pvse.conf.1007L
- Keywords:
-
- Annealing;
- Electron Beams;
- Electron Irradiation;
- Ion Implantation;
- Silicon Junctions;
- Solar Cells;
- Computerized Simulation;
- Phosphorus;
- Pulse Heating;
- Pulsed Radiation;
- Volt-Ampere Characteristics;
- Electronics and Electrical Engineering