High spectral brightness extreme ultraviolet generation with excimer lasers

A high spectral brightness ArF(asterisk) (193 nm) source has been used to generate 64 nm radiation by frequency tripling and 79 nm radiation by frequency mixing. At 64 nm, 30 W, 10 nsec pulses have been observed in a flow geometry designed to minimize absorption arising from photoionization. In addition, short pulse 193 nm radiation, generated by frequency tripling of a pulse amplified, synchronously pumped, mode-locked dye laser, has been amplified in ArF(asterisk) amplifiers to produce an output of 10 mJ, pulse duration less than 10 ps, and bandwidth less than 2 A.