Mirrors for the ultraviolet and infrared ranges

A technique is developed for the production in high and superhigh vacuum of multilayer dielectric, metallodielectric, and metallic mirrors and optical dividers for pulsed lasers operating in the UV and IR ranges. Multilayer metallodielectric mirrors were fabricated with reflection coefficients up to 93 percent for the 170-200 nm region with a radiation stability exceeding 120 MW/sq cm, while multilayer dielectric mirrors were obtained with reflection coefficients up to 90 percent for the same wavelength range with the same radiation stability. Also obtained were interference mirrors with a protective coating for an excimer laser operating in the UV region with a radiation stability of 200 MW/sq cm. Two methods for the nondestructive inspection of gold coatings are proposed, one based on diffraction measurements, the other based on the relationship between radiation stability and reflection coefficient.