Stripe filters on multispectral linear arrays
Abstract
Dielectric interference filters deposited directly on top of existing 200 element charge coupled device linear imaging arrays were designed, fabricated and evaluated. The optical performance of the filters was verified with regard to crosstalk between adjacent detector elements. The filters showed an average in-band transmittance greater than 80% and a total out of band transmittance of less than 5%. Filter stability was adequate for operation in a space environment. The filter elements were definable in 12 to 25 micron element size compatible with existing silicon detectors. These type of measurement were made: (1) spectral transmission of the filter as deposited on witness plates; (2) spectral response of the silicon sensing device; (3) any optical interaction between filter and sensing device; (4) the response of the filter/sensor combination; and (5) repeatability and uniformity of filter characteristics. Detailed discussion of these evaluations are given.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- May 1982
- Bibcode:
- 1982STIN...8532252H
- Keywords:
-
- Electric Filters;
- Electromagnetic Interference;
- Multispectral Band Scanners;
- Multispectral Linear Arrays;
- Charge Coupled Devices;
- Chips (Memory Devices);
- Dielectric Properties;
- Photolithography;
- Sos (Semiconductors);
- Wafers;
- Electronics and Electrical Engineering