Aluminum nitride thin film and composite bulk wave resonators
Abstract
Recent results on the temperature compensated composite bulk wave resonators and edge-only supported thin film resonators using aluminum nitride as the piezoelectric material are described. The composite resonator structures are similar to those reported previously using ZnO fiels on Si membranes. Highly overmoded resonators using piezoelectric fields were also reported with some performing at microwave frequencies.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- 1982
- Bibcode:
- 1982STIN...8327135L
- Keywords:
-
- Aluminum Nitrides;
- Etching;
- Integrated Circuits;
- Multimode Resonators;
- Semiconductors (Materials);
- Silicon Films;
- Thin Films;
- Gallium Arsenides;
- Magnetron Sputtering;
- Piezoelectricity;
- Resonant Frequencies;
- X Ray Diffraction;
- Zinc Oxides;
- Electronics and Electrical Engineering