E beam: An operating system for particle beam lithography
Abstract
A modular suite of subroutines, designed to provide an operating environment for an electron beam lithography machine is described. The suite runs on any PDP-11 16-bit minicomputer with sufficient memory under the RT11 or RSX-11M operating systems. Module names, peripheral addresses and instructions for installation and operation under both operating systems are given together with descriptions of available commands and a list of error messages with possible causes and remedies.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- October 1982
- Bibcode:
- 1982STIN...8326043M
- Keywords:
-
- Lithography;
- Operating Systems (Computers);
- Particle Beams;
- Pdp 11 Computer;
- Subroutine Libraries (Computers);
- Installing;
- Minicomputers;
- Modules;
- User Manuals (Computer Programs);
- Instrumentation and Photography