Semiconductor measurement technology: NBS/RADC Workshop Moisture Measurement Technology for Hermetic Semiconductor Devices, 2
Abstract
The Workshop, one of a series concerned with measurement problems in integrated circuit processing and assembly, served as a forum to examine the progress made in the measurement and control of moisture in hermetically packaged semiconductor devices. Manuscripts are provided of 36 presentations which detail the progress made in mass spectrometer measurements and calibration of internal package moisture, in increased assurance with moisture sensors, in testing, and in package control.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- April 1982
- Bibcode:
- 1982STIN...8313380C
- Keywords:
-
- Conferences;
- Electronic Packaging;
- Hermetic Seals;
- Moisture Meters;
- Semiconductor Devices;
- Accuracy;
- Calibrating;
- Dew Point;
- Integrated Circuits;
- Mass Spectroscopy;
- Moisture Content;
- Process Control (Industry);
- Quality Control;
- Electronics and Electrical Engineering