Morphological and frictional behavior of sputtered MoS2 films

From the texture and growth patterns of sputtered MoS2 films deposited on substrates, three regions are distinguished: (1) a ridge formation region; (2) an equiaxed transition zone; and (3) a columnar-fiber-like structure. The lubricating properties of sputtered MoS2 films are visually identified with respect to optical changes before and after rubbing. The orientation of the surface microcrystallites is identified, and the change in optical properties is explained. In sliding contact the sputtered film tends to break up at the base of the columnar region. Effective lubrication occurs with the film remaining on the substrate. This film is 0.18 to 0.22 microns thick.