The physicochemical fundamentals of semiconductor materials technology
Abstract
The thermodynamics of irreversible processes and the kinetics of homogeneous and heterogeneous processes are reviewed, with emphasis on heat and mass transfer in stationary and moving media. The discussion covers processes for the fabrication of single crystals and epitaxial layers of semiconductor materials, crystal nucleation and growth, and mechanisms underlying the formation of structure defects. Computer algorithms for solving the various problems of heat and mass transfer are presented.
- Publication:
-
Moscow Izdatel Metallurgiia
- Pub Date:
- 1982
- Bibcode:
- 1982MIzMe.........K
- Keywords:
-
- Crystallography;
- Physical Chemistry;
- Semiconductors (Materials);
- Solid State Physics;
- Absorption;
- Convective Heat Transfer;
- Crystal Defects;
- Crystallization;
- Epitaxy;
- Irreversible Processes;
- Kinetic Theory;
- Mass Transfer;
- Semiconducting Films;
- Single Crystals;
- Solid-State Physics