Pressure pulsations above turbomolecular pumps

Lange and Singleton (1978) have observed pressure pulses above a turbomolecular pump. They reported that the mean pulse frequency increased with the temperature of the pump cooling water and that the evolved gas was mainly hydrogen. The present investigation takes into account tests conducted with a similar pumping system. The pumping system was equipped with additional pressure-monitoring equipment in order to study these pulsations in more detail. It was found that at least two distinct types of pressure pulsations may be present in a turbomolecular-pumped ultrahigh vacuum system. The random hydrogen pulses are easily eliminated for period of days by changing the cooling water temperature. The cyclic pulses consisting mainly of water vapor are not likely to be a problem in normal experiments.