Silicon as a mechanical material

Silicon, in conjunction with its conventional role as an electronic material, and taking advantage of an already advanced microfabrication technology, can also be utilized as a high-precision high-strength high-reliability mechanical material, especially applicable wherever miniaturized mechanical devices and components must be integrated or interfaced with electronics. Some of the relevant mechanical aspects of silicon are discussed and compared to other more typical mechanical engineering materials. Micromechanical processing techniques are considered, taking into account etching, electrochemical etching, epitaxial processes, thermomigration, and field-assisted thermal bonding. Attention is given to grooves and holes, silicon membranes, thin cantilever beams, and silicon head technology.