SOI/CMOS circuits fabricated in zone-melting-recrystallized Si films on SiO2-coated Si substrates
Abstract
- Publication:
-
IEEE Electron Device Letters
- Pub Date:
- December 1982
- DOI:
- 10.1109/EDL.1982.25613
- Bibcode:
- 1982IEDL....3..398T
- Keywords:
-
- Cmos;
- Fabrication;
- Oxide Films;
- Silicon Dioxide;
- Silicon Films;
- Zone Melting;
- Chips (Electronics);
- Electrical Insulation;
- Recrystallization;
- Substrates;
- Very Large Scale Integration;
- Volt-Ampere Characteristics;
- Electronics and Electrical Engineering