Uniaxially strained ZnO/SiO2/Si SAW resonators
Abstract
Surface-acoustic-wave (SAW) resonators fabricated on a ZnO/SiO2/Si layered medium have been cantilever-mounted. By deflecting the free end of the substrate, uniaxial biasing strains are induced in the SAW resonator. The effect of these static strains on resonant frequency and SAW phase velocity is assessed.
- Publication:
-
Electronics Letters
- Pub Date:
- November 1982
- DOI:
- 10.1049/el:19820705
- Bibcode:
- 1982ElL....18.1030M
- Keywords:
-
- Cavity Resonators;
- Phase Velocity;
- Resonant Frequencies;
- Surface Acoustic Wave Devices;
- Cantilever Beams;
- Silicon;
- Silicon Dioxide;
- Ultrasonic Wave Transducers;
- Zinc Oxides;
- Electronics and Electrical Engineering