S-Band Shallow Bulk Acoustic Wave (SBAW) microwave source
Abstract
Techniques necessary to fabricate a high performance S-band microwave single source using state-of-the-art shallow bulk acoustic wave (SBAW) were explored. The bulk wave structures of the AlN/Al 2O3 were investigated for both the R plane and basal plane of sapphire. A 1.072 GHz SBAW delay line and oscillators were developed. A method of selecting and setting oscillator output frequency by selecting substrate orientation angle was also established.
- Publication:
-
Final Report TRW Defense and Space Systems Group
- Pub Date:
- July 1981
- Bibcode:
- 1981trw..reptS.....
- Keywords:
-
- Bulk Acoustic Wave Devices;
- Design Analysis;
- Microwave Oscillators;
- Sound Waves;
- Superhigh Frequencies;
- Acoustic Delay Lines;
- Aluminum Nitrides;
- Bandwidth;
- Fabrication;
- Frequency Ranges;
- Phase Shift Circuits;
- Sapphire;
- Electronics and Electrical Engineering