UV-preionized ArF and KrF excimer lasers
Abstract
Experimental investigations of UV-preionized ArF and KrF excimer lasers are reported. The output laser energies of 105 mJ for ArF and 185 mJ for KrF are obtained. Effects of various parameters on the laser characteristics are discussed.
- Publication:
-
In its Laser J. (Selected Articles) (FTD-ID(RS)T-0861-81) p 12-19 (SEE N82-19535 10-36) Transl. into ENGLISH from Laser Journal (China
- Pub Date:
- November 1981
- Bibcode:
- 1981ljsa.rept...12C
- Keywords:
-
- Excimer Lasers;
- Krypton Fluoride Lasers;
- Laser Outputs;
- Ultraviolet Lasers;
- Capacitors;
- Electric Potential;
- Electrodes;
- Energy Levels;
- Gas Ionization;
- Gas Mixtures;
- Spark Gaps;
- Lasers and Masers