Semiconductor measurement technology ARPA/NBS Workshop Moisture Measurement Technology for Hermetic Semiconductor Devices
Abstract
Measurement problems in integrated circuit processing and assembly served as a forum to examine present problems with the measurement of moisture in hermetic semiconductor devices. Manuscripts and summaries are provided of 19 talks, panel meetings, and group encounters on three major topics: mass spectrometer measurements of internal package moisture, moisture sensors, and package analysis and quality assurance.
- Publication:
-
Workshop held at Gaithersburg
- Pub Date:
- May 1981
- Bibcode:
- 1981gamd.work...22S
- Keywords:
-
- Hermetic Seals;
- Integrated Circuits;
- Moisture Content;
- Semiconductor Devices;
- Mass Spectrometers;
- Moisture Meters;
- Quality Control;
- Electronics and Electrical Engineering