Prototype Ge:Ga detectors for the NASA-Ames cooled grating spectrometer
Abstract
The detectors were fabricated from a Ge:Ga wafer from Eagle-Pitcher with a room temperature resistivity of approx. 12ohms cm. The wafer is approximately 2 inches in diameter and 0.061 inches thick. The contact material was ion implanted with Boron using 10 to the 14th power ions/sq cm at 25 Kev and 2 x10 to the 14th power ions/sq cm at 50 Kev. The crystal was then sputter-cleaned and metallized first with sputtered Ti and then sputter Au. In addition to the usual infrared measurements of responsivity and noise, measurements were made of the detectors' response to ionizing radiation.
- Publication:
-
Cornell Univ. Final Report
- Pub Date:
- July 1981
- Bibcode:
- 1981cuni.reptR....H
- Keywords:
-
- Detectors;
- Semiconductor Devices;
- Wafers;
- Fabrication;
- Gallium;
- Germanium;
- Ionizing Radiation;
- Prototypes;
- Surface Finishing;
- Instrumentation and Photography