Silicon quality: A consideration for VHSI circuit development
Abstract
A detailed evaluation of the quality of silicon wafers from representative domestic and foreign vendors was made. To avoid pre-selection of wafers by vendors, material was obtained directly from device manufacturers and therefore represents a statistical sampling of Si material as currently being used in production-line processing. The results of this study have shown extreme batch-to-batch variability, lack of control in material quality and, in many cases, unacceptable levels of defects in silicon wafers used in manufacturing. The development of front-and-back-surface laser-gettering procedures for improving quality is reported and newly developed techniques for stabilizing back-surface damage, using the enhanced diffusion of oxygen, are discussed.
- Publication:
-
Final Report
- Pub Date:
- September 1981
- Bibcode:
- 1981arac.reptS....M
- Keywords:
-
- Defects;
- Quality Control;
- Silicon;
- Solar Cells;
- Wafers;
- Crystal Growth;
- Quality;
- Semiconductor Devices;
- Statistical Analysis;
- Thin Films;
- Electronics and Electrical Engineering