Chemical etching for automatic processing of integrated circuits
Abstract
Chemical etching for automatic processing of integrated circuits is discussed. The wafer carrier and loading from a receiving air track into automatic furnaces and unloading onto a sending air track are included.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- April 1981
- Bibcode:
- 1981STIN...8322514K
- Keywords:
-
- Automatic Control;
- Etching;
- Integrated Circuits;
- Materials Handling;
- Wafers;
- Cleanliness;
- Furnaces;
- Loading Operations;
- Safety Factors;
- Electronics and Electrical Engineering