The scanning proton microprobe
Abstract
Some basic principles of ion-atom interactions are reviewed in order to discuss the characteristics and unique features of a scanning proton microprobe and to assess the potential of such an instrument. After a brief description of the instrument, examples are given of some applications, including spot analysis, depth profiling and scanning analysis with the Melbourne total data handling technique. This technique is applicable to all scanning probes and is of particular value with sensitive specimens.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- 1981
- Bibcode:
- 1981STIN...8226651L
- Keywords:
-
- Ion Atom Interactions;
- Microanalysis;
- Proton Beams;
- Scanners;
- Data Processing;
- Depth;
- Nondestructive Tests;
- Spatial Distribution;
- X Ray Analysis;
- Instrumentation and Photography