Electron-beam array lithography stitching experiments Kellogg, E. M. ; Bono, D. C. ; Dalterio, M. J. ; Gibilaro, G. R. ; Greenstein, D. B. ; Harte, K. J. ; Singhal, V. K. ; Walker, D. M. Abstract Publication: Journal of Vacuum Science Technology Pub Date: November 1981 DOI: 10.1116/1.571199 Bibcode: 1981JVST...19..958B