Use of surface plasma waves for determination of the thickness and optical constants of thin metallic films
Abstract
The surface plasma wave (SPW) technique for determining the frequency-dependent dielectric constant epsilon(omega) and the thickness d of a metal film without a present expression for epsilon(omega) is discussed. It is shown that two sets of solutions can be derived from the resonant excitation of the SPW at a given frequency. Solutions at another frequency are required to select the correct sets for epsilon(omega) and d (those with the same d for both frequencies).
- Publication:
-
Journal of the Optical Society of America (1917-1983)
- Pub Date:
- February 1981
- Bibcode:
- 1981JOSA...71..189C
- Keywords:
-
- Electromagnetic Surface Waves;
- Film Thickness;
- Metal Films;
- Optical Thickness;
- Plasma Waves;
- Thin Films;
- Curve Fitting;
- Depth Measurement;
- Dielectrics;
- Frequency Response;
- Plasma Diagnostics;
- Spectral Reflectance;
- Instrumentation and Photography