Optical heterodyne profilometry
Abstract
A noncontact method of measuring surface profile is presented which does not require a reference surface and has a height sensitivity of the order of 1 A. The method employs a common path heterodyne interferometer in which two orthogonally polarized beams of slightly different frequency are focused on the surface to be measured. One focal beam acts as a reference while the other circularly scans the surface.
- Publication:
-
Applied Optics
- Pub Date:
- February 1981
- DOI:
- 10.1364/AO.20.000610
- Bibcode:
- 1981ApOpt..20..610S
- Keywords:
-
- Laser Interferometry;
- Optical Heterodyning;
- Optical Scanners;
- Profilometers;
- Remote Sensors;
- Surface Geometry;
- Focusing;
- Optical Measuring Instruments;
- Optical Polarization;
- Polarization Characteristics;
- Spectral Sensitivity;
- Instrumentation and Photography;
- METROLOGY;
- SURFACES;
- HETERODYNING