Properties of various silicon oxide phases in thin films
Abstract
Layers of SiO2 with reproducible properties can be manufactured relatively easily today. In the case of SiO and Si2O3 layers, it is necessary to carefully check all of the manufacturing parameters for producing layers with reproducible properties. The properties of the layers in the case of SiO2 do conform to expectations. In the case of Si2O3 and SiO, they can be understood at least qualitatively. Additional interesting models are available for a quantitative understanding.
- Publication:
-
Properties of various silicon oxide phases in thin films Transl. into ENGLISH from Vakuum-Tech. (West Germany
- Pub Date:
- August 1980
- Bibcode:
- 1980pvso.rept...42R
- Keywords:
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- Chemical Properties;
- Process Control (Industry);
- Silicon Oxides;
- Thin Films;
- Manufacturing;
- Quality Control;
- Solid-State Physics