Laser damage resistant copper surfaces with high reflectivity after oxidation

Ion implantation of aluminum into copper was used to produce mirror surfaces with improved properties with respect to pulsed laser damage. Upon oxidation of implanted samples, they show a much higher reflectivity of the laser pulse compared to nonimplanted samples. The oxidation followed by Rutherford backscattering technique and nuclear reactions, and the improved surface properties are explained by the presence of compound oxide layer beneath the surface, which shows greater stability against decomposition than the pure metal oxide. This novel coating technique, comprising ion implantation and oxidation may be advantageous in improving surface properties such as reflectivity of metal mirrors.