Semiconductor measurement technology: Metrology for submicrometer devices and circuits

The metrological requirements of semiconductor microelectronics are made more stringent not only because of the obvious demands associated with the smaller feature sizes of circuit elements but also because of the attendant requirements for more efficient design verification aids, computer simulations, and process validation and control techniques and because of the concurrent trend toward larger die and package sizes. The types of metrological requirements associated with submicrometer devices and structures are examined, the present state of the art in selected critical areas of metrology summarized, and current research and development efforts on advanced measurement technology reviewed.