SEM analysis techniques for LSI microcircuits, volume 1
Abstract
Scanning Electron Microscope (SEM) Applications were developed and demonstrated for determining circuit configuration and organization. These applications employ voltage contrast and Electron Beam Induced Current (EBIC) techniques. Procedures were developed utilizing these applications to evaluate semiconductor memory circuits. These procedures provide practical methods for developing die maps, electrical circuit schematics, logic diagrams, device block diagrams and memory array bit maps. The SEM data are used in conjunction with light microscopy data to provide significant improvements in device characterization.
- Publication:
-
Martin Marietta Corp. Report
- Pub Date:
- August 1980
- Bibcode:
- 1980mmc..reptQ....B
- Keywords:
-
- Failure Analysis;
- Logic Circuits;
- Microelectronics;
- Circuit Diagrams;
- Digital Systems;
- Integrated Circuits;
- Metal Oxide Semiconductors;
- Electronics and Electrical Engineering