Low energy ion beam systems for surface analytical and structural studies
Abstract
The use of low energy ion beam systems for surface analytical and structural studies is addressed. Areas where analytical methods which utilize ion beams can provide a unique insight into materials problems are discussed. The design criteria of ion beam systems for performing materials studies are described and the systems now being used by a number of laboratories are reviewed. Finally, several specific problems are described where the solution was provided at least in part by information provided by low energy ion analysis techniques.
- Publication:
-
Presented at Intern. Conf. on Low Energy Ion Beams
- Pub Date:
- 1980
- Bibcode:
- 1980leib.conf.....N
- Keywords:
-
- Ion Beams;
- Spectroscopic Analysis;
- Structural Analysis;
- Ion Scattering;
- Mass Spectroscopy;
- Sputtering;
- Surface Properties;
- Surface Reactions;
- Atomic and Molecular Physics