GaAs Schottky barrier interface analysis by AES
Abstract
Auger electron spectroscopy has been used to study Pt/GaAs, Au/GaAs, and Au/Pt/GaAs junctions formed by electroplating. No impurities, except Sn and Ni, have been observed in the pulse-electroplated Schottky diode anodes, which supports the conclusion that electroplating is not a 'dirty' method of metallization. The absence of oxygen at the interface has been confirmed and possible diffusion of Pt and Pt/GaAs interface has been explored.
- Publication:
-
13th Asilomar Conference on Circuits, Systems, and Computers
- Pub Date:
- 1980
- Bibcode:
- 1980ieee.conf...14A
- Keywords:
-
- Auger Spectroscopy;
- Gallium Arsenides;
- Schottky Diodes;
- Semiconductor Diodes;
- Solid-Solid Interfaces;
- Gold;
- N-Type Semiconductors;
- Platinum;
- Substrates;
- Temporal Distribution;
- Electronics and Electrical Engineering