Application of ion implantation in the manufacturing of monolithic bipolar analogue integrated circuits
Abstract
The application of ion implantation for bipolar analogue integrated circuits was investigated under different aspects of bipolar technology. The main items are: high frequency transistors; bases; resistors (especially those with a high resistance); passivation methods; and components. The existing doping methods are replaced by more controllable ion implantation and processes are developed which can only be realized by ion implantation. In both cases, processes are developed with technological as well as economical advantages concerning standard technologies.
- Publication:
-
NASA STI/Recon Technical Report N
- Pub Date:
- December 1980
- Bibcode:
- 1980STIN...8310374D
- Keywords:
-
- Analog Circuits;
- Integrated Circuits;
- Ion Implantation;
- Manufacturing;
- Metal Oxide Semiconductors;
- Bipolar Transistors;
- Data Converters;
- Field Effect Transistors;
- High Frequencies;
- Electronics and Electrical Engineering