Precision design in microelectronics
Abstract
Methods for assuring the prescribed fabrication precision and tolerances of microelectronic devices, viewed as complex systems, are described. Precision design in the case of thin-film and semiconductor techniques for the production of microelectronic circuits is examined. Methods of quality control are considered, and a dynamic programming procedure for calculating optimal tolerances is presented.
- Publication:
-
Leningrad Izdatel Leningradskogo Universiteta
- Pub Date:
- 1980
- Bibcode:
- 1980LeIzU....R....S
- Keywords:
-
- Design Analysis;
- Integrated Circuits;
- Microelectronics;
- Quality Control;
- Semiconductor Devices;
- Thin Films;
- Dynamic Programming;
- Fabrication;
- Precision;
- Electronics and Electrical Engineering