A process for the simultaneous production of radiation hardened complementary linear bipolar and linear metal gate CMOS devices
Abstract
- Publication:
-
IEEE Transactions on Nuclear Science
- Pub Date:
- December 1980
- DOI:
- Bibcode:
- 1980ITNS...27.1721P
- Keywords:
-
- Bipolar Transistors;
- Cmos;
- Fabrication;
- Radiation Hardening;
- Digital Techniques;
- Gates (Circuits);
- Radiation Dosage;
- Silicon;
- Substrates;
- Electronics and Electrical Engineering